Product Introduction
Avantgarde Room Temperature Permanent Magnet Probe Stations provide a test platform for the electrical parameter testing of semiconductor chips, with different external measuring instruments, with the measuring instruments can be completed with the integrated circuits, such as voltage, current, resistance, and capacitance-voltage characteristic curves and other parameters of the test. In addition, it can be used to measure carrier concentration, mobility, resistivity, Hall coefficient and other important Hall parameters of semiconductor materials. Non-destructive testing of chips, wafers and devices at room temperature.
PSPM Series Room Temperature Permanent Magnet Probe Stage is a probe stage specially developed for room temperature vertical magnetic field electrical testing environment, providing 0.5T vertical magnetic field, capable of performing repetitive and standard electrical experiments on 2", 4", 6" and 8" wafers, and the external connection of different test equipments can complete the electrical characterization, parameter measurement, DC measurement, RF measurement, and Hall measurement of the devices.
Features
- The sample holder can hold up to 8-inch wafer samples. By moving the sliding table under the sample holder, a maximum travel of ±100mm in the X-Y axis can be realized, and the sample holder itself can be finely adjusted in three dimensions, which makes the sample testing and sample exchange more convenient.
- The base of the probe arm is fixed with a magnet, allowing the probe to be adjusted in three dimensions, X-Y-Z, and with the sample holder's shift adjustment, the probe can be quickly inserted into any position up to 8 inches of the sample.
- The probe arm is made of triaxial cable and triaxial connector, with low leakage current within 100 fA, and built-in cable to avoid messy wiring.
- The probe is fixed with a needle sleeve, only the tip of the needle is exposed, reducing the leakage of electricity.
- The permanent magnet adopts electric control, which can realize the forward and backward turning movement.
- The permanent magnet holder and the probe stage adopt separate isolation bracket to avoid vibration conduction to the sample when the magnet is in motion.
- Sample fixing method adopts porous partition adsorption, there are three individually controlled gas adsorption channels in the outer ring, inner ring and the middle, and the minimum adsorption fixing can be 1mm*1mm samples.
